At this conference, we presented the new extension of Planimize Schedule Optimizer to the Plasma-Etch area. The major feature is the introduction of cluster tools. This type of equipment is complex and consists of several internal resources, called chambers. Similarly to other types of tools, such as single-wafer tools, cluster tools have load ports. However, they are different, because of the additional resources, e.g. chambers or buffer stations.

L’article Participation to apc|m Conference – Catania est apparu en premier sur Planimize.